200 mm travel, +/-1 um repeatability, direct-drive linear motor, granite base.行程 200 mm,重复定位精度 ±1 μm,直线电机直驱,花岗岩基座。
The PLS-200 is a direct-drive linear stage for wafer handling, optical alignment and precision assembly. A granite base and preloaded crossed-roller guides remove thermal drift, while the ironless linear motor delivers 0.5 um resolution without backlash. Each unit is laser-interferometer tested and shipped with its own accuracy chart.PLS-200 为直驱式直线平台,适用于晶圆搬运、光学对准与精密装配。花岗岩基座与预紧交叉滚子导轨有效抑制热漂移,无铁芯直线电机实现 0.5 μm 分辨率且无反向间隙。每台均经激光干涉仪检测,随货提供精度曲线报告。
The interferometer report matched our own measurements to within 0.3 um on every axis.
We compared four suppliers for the wafer robot. Weizhun was the only one that sent a particle test report with the quotation.
Three assembly lines delivered on schedule, and their MES team integrated with ours in under a week.
Complete your order with these matching products.搭配采购,享受更优的整体价格。