New新品-11%
SEMI S2SEMI S2300 mm wafer, vacuum-compatible, +/-0.05 mm repeatability, ISO Class 4.300 mm 晶圆，兼容真空，重复定位精度 ±0.05 mm，ISO 4 级洁净。
A single-arm wafer transfer robot for EFEM and load-lock applications. The direct-drive theta axis and linear Z axis give 0.05 mm repeatability with a 2 kg load, and all moving parts are rated for ISO Class 4 cleanrooms. Vacuum-compatible wiring and low-outgassing materials are available for load-lock mounting.单臂晶圆传输机器人，适用于 EFEM 与 Load-Lock 场景。直驱 θ 轴与直线 Z 轴在 2 kg 负载下重复定位精度达 0.05 mm，运动部件满足 ISO 4 级洁净室要求。可选真空兼容线缆与低放气材料，便于安装于 Load-Lock。
The interferometer report matched our own measurements to within 0.3 um on every axis.
We compared four suppliers for the wafer robot. Weizhun was the only one that sent a particle test report with the quotation.
Three assembly lines delivered on schedule, and their MES team integrated with ours in under a week.
Complete your order with these matching products.搭配采购，享受更优的整体价格。
