6-axis, 5 kg payload, ISO Class 4, low-particle direct drives.六轴,负载 5 kg,ISO 4 级洁净,低发尘直驱关节。
A six-axis cleanroom robot for wafer, medical and battery cell handling. Direct-drive joints, internal cable routing and a sealed white epoxy finish keep particle emission below ISO Class 4 limits. The controller supports EtherCAT and SECS/GEM plus vision-guided pick, making integration into existing semiconductor lines straightforward.六轴洁净室机器人,适用于晶圆、医疗与电池电芯搬运。直驱关节、内部走线与白色环氧密封涂装使发尘量低于 ISO 4 级限值。控制器支持 EtherCAT、SECS/GEM 与视觉引导抓取,便于集成到现有半导体产线。
The interferometer report matched our own measurements to within 0.3 um on every axis.
We compared four suppliers for the wafer robot. Weizhun was the only one that sent a particle test report with the quotation.
Three assembly lines delivered on schedule, and their MES team integrated with ours in under a week.
Complete your order with these matching products.搭配采购,享受更优的整体价格。